2/25/10	10:15:14 AM	Program started normally
2/25/10	10:15:14 AM	Helium valve closed
2/25/10	10:15:14 AM	H2 valve closed
2/25/10	10:15:14 AM	BCl3 valve closed
2/25/10	10:15:14 AM	PH3 valve closed
2/25/10	10:15:14 AM	SiCl4 pre valve closed
2/25/10	10:15:14 AM	SiCl4 post valve closed
2/25/10	10:15:14 AM	Main Vac valve closed
2/25/10	10:15:14 AM	Bypass valve closed
2/25/10	10:15:14 AM	Bubbler valve closed
2/25/10	10:15:15 AM	Helium MFC set to  0.000000
2/25/10	10:15:15 AM	H2 MFC set to  0.000000
2/25/10	10:15:15 AM	BCl3 MFC set to  0.000000
2/25/10	10:15:15 AM	SiCl4 MFC set to  0.000000
2/25/10	10:15:15 AM	Bypass solenoid MFC set to  760.000000
2/25/10	10:15:15 AM	Tube furnace set to 0
2/25/10	10:15:24 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	10:15:26 AM	Recipe started at 10:15 AM
2/25/10	10:15:27 AM	H2 valve closed
2/25/10	10:15:27 AM	BCl3 valve closed
2/25/10	10:15:27 AM	PH3 valve closed
2/25/10	10:15:27 AM	SiCl4 pre valve closed
2/25/10	10:15:27 AM	SiCl4 post valve closed
2/25/10	10:15:27 AM	Main Vac valve closed
2/25/10	10:15:27 AM	Bypass valve closed
2/25/10	10:15:27 AM	Bubbler valve closed
2/25/10	10:15:27 AM	Helium valve opened
2/25/10	10:15:27 AM	Helium MFC set to  500.000000
2/25/10	10:15:27 AM	H2 MFC set to  0.000000
2/25/10	10:15:27 AM	BCl3 MFC set to  0.000000
2/25/10	10:15:27 AM	SiCl4 MFC set to  0.000000
2/25/10	10:15:27 AM	Bypass solenoid MFC set to  0.000000
2/25/10	10:15:27 AM	Tube furnace set to 0
2/25/10	10:15:38 AM	Helium valve closed
2/25/10	10:15:38 AM	H2 valve closed
2/25/10	10:15:38 AM	BCl3 valve closed
2/25/10	10:15:38 AM	PH3 valve closed
2/25/10	10:15:38 AM	SiCl4 pre valve closed
2/25/10	10:15:38 AM	SiCl4 post valve closed
2/25/10	10:15:38 AM	Main Vac valve closed
2/25/10	10:15:38 AM	Bypass valve closed
2/25/10	10:15:38 AM	Bubbler valve closed
2/25/10	10:15:38 AM	Helium MFC set to  0.000000
2/25/10	10:15:38 AM	H2 MFC set to  0.000000
2/25/10	10:15:38 AM	BCl3 MFC set to  0.000000
2/25/10	10:15:38 AM	SiCl4 MFC set to  0.000000
2/25/10	10:15:38 AM	Bypass solenoid MFC set to  0.000000
2/25/10	10:15:38 AM	Tube furnace set to 0
2/25/10	10:15:39 AM	Run finished at 10:15 AM
2/25/10	10:15:39 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	10:24:29 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	10:24:34 AM	Recipe started at 10:24 AM
2/25/10	10:24:34 AM	H2 valve closed
2/25/10	10:24:34 AM	BCl3 valve closed
2/25/10	10:24:34 AM	PH3 valve closed
2/25/10	10:24:34 AM	SiCl4 pre valve closed
2/25/10	10:24:34 AM	SiCl4 post valve closed
2/25/10	10:24:34 AM	Main Vac valve closed
2/25/10	10:24:34 AM	Bypass valve closed
2/25/10	10:24:34 AM	Bubbler valve closed
2/25/10	10:24:34 AM	Helium valve opened
2/25/10	10:24:34 AM	Helium MFC set to  500.000000
2/25/10	10:24:34 AM	H2 MFC set to  0.000000
2/25/10	10:24:34 AM	BCl3 MFC set to  0.000000
2/25/10	10:24:34 AM	SiCl4 MFC set to  0.000000
2/25/10	10:24:34 AM	Bypass solenoid MFC set to  0.000000
2/25/10	10:24:34 AM	Tube furnace set to 0
2/25/10	10:24:41 AM	Helium valve closed
2/25/10	10:24:41 AM	H2 valve closed
2/25/10	10:24:41 AM	BCl3 valve closed
2/25/10	10:24:41 AM	PH3 valve closed
2/25/10	10:24:41 AM	SiCl4 pre valve closed
2/25/10	10:24:41 AM	SiCl4 post valve closed
2/25/10	10:24:41 AM	Main Vac valve closed
2/25/10	10:24:41 AM	Bypass valve closed
2/25/10	10:24:41 AM	Bubbler valve closed
2/25/10	10:24:41 AM	Helium MFC set to  0.000000
2/25/10	10:24:41 AM	H2 MFC set to  0.000000
2/25/10	10:24:41 AM	BCl3 MFC set to  0.000000
2/25/10	10:24:41 AM	SiCl4 MFC set to  0.000000
2/25/10	10:24:41 AM	Bypass solenoid MFC set to  0.000000
2/25/10	10:24:41 AM	Tube furnace set to 0
2/25/10	10:24:41 AM	Run finished at 10:24 AM
2/25/10	10:24:41 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	10:47:59 AM	Program exited cleanly
2/25/10	10:50:03 AM	Program started normally
2/25/10	10:50:03 AM	Helium valve closed
2/25/10	10:50:03 AM	H2 valve closed
2/25/10	10:50:03 AM	BCl3 valve closed
2/25/10	10:50:03 AM	PH3 valve closed
2/25/10	10:50:03 AM	SiCl4 pre valve closed
2/25/10	10:50:03 AM	SiCl4 post valve closed
2/25/10	10:50:03 AM	Main Vac valve closed
2/25/10	10:50:03 AM	Bypass valve closed
2/25/10	10:50:03 AM	Bubbler valve closed
2/25/10	10:50:03 AM	Helium MFC set to  0.000000
2/25/10	10:50:04 AM	H2 MFC set to  0.000000
2/25/10	10:50:04 AM	BCl3 MFC set to  0.000000
2/25/10	10:50:04 AM	SiCl4 MFC set to  0.000000
2/25/10	10:50:04 AM	Bypass solenoid MFC set to  760.000000
2/25/10	10:50:04 AM	Tube furnace set to 0
2/25/10	10:50:05 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	10:50:07 AM	Recipe started at 10:50 AM
2/25/10	10:50:08 AM	H2 valve closed
2/25/10	10:50:08 AM	BCl3 valve closed
2/25/10	10:50:08 AM	PH3 valve closed
2/25/10	10:50:08 AM	SiCl4 pre valve closed
2/25/10	10:50:08 AM	SiCl4 post valve closed
2/25/10	10:50:08 AM	Main Vac valve closed
2/25/10	10:50:08 AM	Bypass valve closed
2/25/10	10:50:08 AM	Bubbler valve closed
2/25/10	10:50:08 AM	Helium valve opened
2/25/10	10:50:08 AM	Helium MFC set to  500.000000
2/25/10	10:50:08 AM	H2 MFC set to  0.000000
2/25/10	10:50:08 AM	BCl3 MFC set to  0.000000
2/25/10	10:50:08 AM	SiCl4 MFC set to  0.000000
2/25/10	10:50:08 AM	Bypass solenoid MFC set to  0.000000
2/25/10	10:50:08 AM	Tube furnace set to 0
2/25/10	10:50:13 AM	Helium valve closed
2/25/10	10:50:13 AM	H2 valve closed
2/25/10	10:50:13 AM	BCl3 valve closed
2/25/10	10:50:13 AM	PH3 valve closed
2/25/10	10:50:13 AM	SiCl4 pre valve closed
2/25/10	10:50:13 AM	SiCl4 post valve closed
2/25/10	10:50:13 AM	Main Vac valve closed
2/25/10	10:50:13 AM	Bypass valve closed
2/25/10	10:50:13 AM	Bubbler valve closed
2/25/10	10:50:13 AM	Helium MFC set to  0.000000
2/25/10	10:50:13 AM	H2 MFC set to  0.000000
2/25/10	10:50:13 AM	BCl3 MFC set to  0.000000
2/25/10	10:50:13 AM	SiCl4 MFC set to  0.000000
2/25/10	10:50:13 AM	Bypass solenoid MFC set to  0.000000
2/25/10	10:50:13 AM	Tube furnace set to 0
2/25/10	10:50:13 AM	Run finished at 10:50 AM
2/25/10	10:50:13 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:02:49 AM	Program started after a nonstandard shutdown
2/25/10	11:02:49 AM	Helium valve closed
2/25/10	11:02:49 AM	H2 valve closed
2/25/10	11:02:49 AM	BCl3 valve closed
2/25/10	11:02:49 AM	PH3 valve closed
2/25/10	11:02:49 AM	SiCl4 pre valve closed
2/25/10	11:02:49 AM	SiCl4 post valve closed
2/25/10	11:02:49 AM	Main Vac valve closed
2/25/10	11:02:49 AM	Bypass valve closed
2/25/10	11:02:49 AM	Bubbler valve closed
2/25/10	11:02:49 AM	Helium MFC set to  0.000000
2/25/10	11:02:49 AM	H2 MFC set to  0.000000
2/25/10	11:02:49 AM	BCl3 MFC set to  0.000000
2/25/10	11:02:49 AM	SiCl4 MFC set to  0.000000
2/25/10	11:02:49 AM	Bypass solenoid MFC set to  760.000000
2/25/10	11:02:49 AM	Tube furnace set to 0
2/25/10	11:02:51 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:02:53 AM	Recipe started at 11:02 AM
2/25/10	11:02:53 AM	H2 valve closed
2/25/10	11:02:53 AM	BCl3 valve closed
2/25/10	11:02:54 AM	PH3 valve closed
2/25/10	11:02:54 AM	SiCl4 pre valve closed
2/25/10	11:02:54 AM	SiCl4 post valve closed
2/25/10	11:02:54 AM	Main Vac valve closed
2/25/10	11:02:54 AM	Bypass valve closed
2/25/10	11:02:54 AM	Bubbler valve closed
2/25/10	11:02:54 AM	Helium valve opened
2/25/10	11:02:54 AM	Helium MFC set to  500.000000
2/25/10	11:02:54 AM	H2 MFC set to  0.000000
2/25/10	11:02:54 AM	BCl3 MFC set to  0.000000
2/25/10	11:02:54 AM	SiCl4 MFC set to  0.000000
2/25/10	11:02:54 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:02:54 AM	Tube furnace set to 0
2/25/10	11:02:57 AM	Helium valve closed
2/25/10	11:02:57 AM	H2 valve closed
2/25/10	11:02:57 AM	BCl3 valve closed
2/25/10	11:02:57 AM	PH3 valve closed
2/25/10	11:02:57 AM	SiCl4 pre valve closed
2/25/10	11:02:57 AM	SiCl4 post valve closed
2/25/10	11:02:57 AM	Main Vac valve closed
2/25/10	11:02:57 AM	Bypass valve closed
2/25/10	11:02:57 AM	Bubbler valve closed
2/25/10	11:02:57 AM	Helium MFC set to  0.000000
2/25/10	11:02:57 AM	H2 MFC set to  0.000000
2/25/10	11:02:57 AM	BCl3 MFC set to  0.000000
2/25/10	11:02:57 AM	SiCl4 MFC set to  0.000000
2/25/10	11:02:57 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:02:57 AM	Tube furnace set to 0
2/25/10	11:02:58 AM	Run finished at 11:02 AM
2/25/10	11:02:58 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:03:26 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:03:28 AM	Recipe started at 11:03 AM
2/25/10	11:03:28 AM	H2 valve closed
2/25/10	11:03:28 AM	BCl3 valve closed
2/25/10	11:03:28 AM	PH3 valve closed
2/25/10	11:03:28 AM	SiCl4 pre valve closed
2/25/10	11:03:28 AM	SiCl4 post valve closed
2/25/10	11:03:28 AM	Main Vac valve closed
2/25/10	11:03:28 AM	Bypass valve closed
2/25/10	11:03:28 AM	Bubbler valve closed
2/25/10	11:03:28 AM	Helium valve opened
2/25/10	11:03:28 AM	Helium MFC set to  500.000000
2/25/10	11:03:28 AM	H2 MFC set to  0.000000
2/25/10	11:03:28 AM	BCl3 MFC set to  0.000000
2/25/10	11:03:28 AM	SiCl4 MFC set to  0.000000
2/25/10	11:03:28 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:03:28 AM	Tube furnace set to 0
2/25/10	11:03:30 AM	Helium valve closed
2/25/10	11:03:30 AM	H2 valve closed
2/25/10	11:03:30 AM	BCl3 valve closed
2/25/10	11:03:30 AM	PH3 valve closed
2/25/10	11:03:30 AM	SiCl4 pre valve closed
2/25/10	11:03:30 AM	SiCl4 post valve closed
2/25/10	11:03:30 AM	Main Vac valve closed
2/25/10	11:03:30 AM	Bypass valve closed
2/25/10	11:03:30 AM	Bubbler valve closed
2/25/10	11:03:30 AM	Helium MFC set to  0.000000
2/25/10	11:03:30 AM	H2 MFC set to  0.000000
2/25/10	11:03:30 AM	BCl3 MFC set to  0.000000
2/25/10	11:03:30 AM	SiCl4 MFC set to  0.000000
2/25/10	11:03:30 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:03:30 AM	Tube furnace set to 0
2/25/10	11:03:30 AM	Run finished at 11:03 AM
2/25/10	11:03:30 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:03:53 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:pumpdown.xml
2/25/10	11:03:55 AM	Recipe started at 11:03 AM
2/25/10	11:03:55 AM	Helium valve closed
2/25/10	11:03:55 AM	H2 valve closed
2/25/10	11:03:55 AM	BCl3 valve closed
2/25/10	11:03:55 AM	PH3 valve closed
2/25/10	11:03:55 AM	SiCl4 pre valve closed
2/25/10	11:03:55 AM	SiCl4 post valve closed
2/25/10	11:03:55 AM	Main Vac valve closed
2/25/10	11:03:55 AM	Bubbler valve closed
2/25/10	11:03:55 AM	Bypass valve opened
2/25/10	11:03:55 AM	Helium MFC set to  0.000000
2/25/10	11:03:55 AM	H2 MFC set to  0.000000
2/25/10	11:03:55 AM	BCl3 MFC set to  0.000000
2/25/10	11:03:55 AM	SiCl4 MFC set to  0.000000
2/25/10	11:03:55 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:03:55 AM	Tube furnace set to 0
2/25/10	11:04:03 AM	Helium valve closed
2/25/10	11:04:03 AM	H2 valve closed
2/25/10	11:04:03 AM	BCl3 valve closed
2/25/10	11:04:03 AM	PH3 valve closed
2/25/10	11:04:03 AM	SiCl4 pre valve closed
2/25/10	11:04:03 AM	SiCl4 post valve closed
2/25/10	11:04:03 AM	Bubbler valve closed
2/25/10	11:04:03 AM	Main Vac valve opened
2/25/10	11:04:03 AM	Bypass valve opened
2/25/10	11:04:03 AM	Helium MFC set to  0.000000
2/25/10	11:04:03 AM	H2 MFC set to  0.000000
2/25/10	11:04:03 AM	BCl3 MFC set to  0.000000
2/25/10	11:04:03 AM	SiCl4 MFC set to  0.000000
2/25/10	11:04:03 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:04:03 AM	Tube furnace set to 0
2/25/10	11:04:04 AM	Run finished at 11:04 AM
2/25/10	11:04:04 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:pumpdown.xml
2/25/10	11:04:09 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:04:12 AM	Recipe started at 11:04 AM
2/25/10	11:04:12 AM	H2 valve closed
2/25/10	11:04:12 AM	BCl3 valve closed
2/25/10	11:04:12 AM	PH3 valve closed
2/25/10	11:04:12 AM	SiCl4 pre valve closed
2/25/10	11:04:12 AM	SiCl4 post valve closed
2/25/10	11:04:12 AM	Main Vac valve closed
2/25/10	11:04:12 AM	Bypass valve closed
2/25/10	11:04:12 AM	Bubbler valve closed
2/25/10	11:04:12 AM	Helium valve opened
2/25/10	11:04:12 AM	Helium MFC set to  500.000000
2/25/10	11:04:12 AM	H2 MFC set to  0.000000
2/25/10	11:04:12 AM	BCl3 MFC set to  0.000000
2/25/10	11:04:12 AM	SiCl4 MFC set to  0.000000
2/25/10	11:04:12 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:04:12 AM	Tube furnace set to 0
2/25/10	11:04:16 AM	Helium valve closed
2/25/10	11:04:16 AM	H2 valve closed
2/25/10	11:04:16 AM	BCl3 valve closed
2/25/10	11:04:16 AM	PH3 valve closed
2/25/10	11:04:16 AM	SiCl4 pre valve closed
2/25/10	11:04:16 AM	SiCl4 post valve closed
2/25/10	11:04:16 AM	Main Vac valve closed
2/25/10	11:04:16 AM	Bypass valve closed
2/25/10	11:04:16 AM	Bubbler valve closed
2/25/10	11:04:16 AM	Helium MFC set to  0.000000
2/25/10	11:04:16 AM	H2 MFC set to  0.000000
2/25/10	11:04:16 AM	BCl3 MFC set to  0.000000
2/25/10	11:04:16 AM	SiCl4 MFC set to  0.000000
2/25/10	11:04:16 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:04:16 AM	Tube furnace set to 0
2/25/10	11:04:17 AM	Run finished at 11:04 AM
2/25/10	11:04:17 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:05:08 AM	Program exited cleanly
2/25/10	11:07:59 AM	Program started normally
2/25/10	11:07:59 AM	Helium valve closed
2/25/10	11:07:59 AM	H2 valve closed
2/25/10	11:07:59 AM	BCl3 valve closed
2/25/10	11:07:59 AM	PH3 valve closed
2/25/10	11:07:59 AM	SiCl4 pre valve closed
2/25/10	11:07:59 AM	SiCl4 post valve closed
2/25/10	11:07:59 AM	Main Vac valve closed
2/25/10	11:07:59 AM	Bypass valve closed
2/25/10	11:07:59 AM	Bubbler valve closed
2/25/10	11:07:59 AM	Helium MFC set to  0.000000
2/25/10	11:07:59 AM	H2 MFC set to  0.000000
2/25/10	11:07:59 AM	BCl3 MFC set to  0.000000
2/25/10	11:07:59 AM	SiCl4 MFC set to  0.000000
2/25/10	11:07:59 AM	Bypass solenoid MFC set to  760.000000
2/25/10	11:07:59 AM	Tube furnace set to 0
2/25/10	11:08:01 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:08:03 AM	Recipe started at 11:08 AM
2/25/10	11:08:03 AM	H2 valve closed
2/25/10	11:08:03 AM	BCl3 valve closed
2/25/10	11:08:03 AM	PH3 valve closed
2/25/10	11:08:03 AM	SiCl4 pre valve closed
2/25/10	11:08:03 AM	SiCl4 post valve closed
2/25/10	11:08:03 AM	Main Vac valve closed
2/25/10	11:08:03 AM	Bypass valve closed
2/25/10	11:08:03 AM	Bubbler valve closed
2/25/10	11:08:03 AM	Helium valve opened
2/25/10	11:08:03 AM	Helium MFC set to  500.000000
2/25/10	11:08:03 AM	H2 MFC set to  0.000000
2/25/10	11:08:03 AM	BCl3 MFC set to  0.000000
2/25/10	11:08:03 AM	SiCl4 MFC set to  0.000000
2/25/10	11:08:03 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:08:03 AM	Tube furnace set to 0
2/25/10	11:08:12 AM	Helium valve closed
2/25/10	11:08:12 AM	H2 valve closed
2/25/10	11:08:12 AM	BCl3 valve closed
2/25/10	11:08:12 AM	PH3 valve closed
2/25/10	11:08:12 AM	SiCl4 pre valve closed
2/25/10	11:08:12 AM	SiCl4 post valve closed
2/25/10	11:08:12 AM	Main Vac valve closed
2/25/10	11:08:12 AM	Bypass valve closed
2/25/10	11:08:12 AM	Bubbler valve closed
2/25/10	11:08:12 AM	Helium MFC set to  0.000000
2/25/10	11:08:12 AM	H2 MFC set to  0.000000
2/25/10	11:08:12 AM	BCl3 MFC set to  0.000000
2/25/10	11:08:12 AM	SiCl4 MFC set to  0.000000
2/25/10	11:08:12 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:08:12 AM	Tube furnace set to 0
2/25/10	11:08:12 AM	Run finished at 11:08 AM
2/25/10	11:08:12 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:08:43 AM	Program exited cleanly
2/25/10	11:10:11 AM	Program started normally
2/25/10	11:10:11 AM	Helium valve closed
2/25/10	11:10:11 AM	H2 valve closed
2/25/10	11:10:11 AM	BCl3 valve closed
2/25/10	11:10:11 AM	PH3 valve closed
2/25/10	11:10:11 AM	SiCl4 pre valve closed
2/25/10	11:10:11 AM	SiCl4 post valve closed
2/25/10	11:10:11 AM	Main Vac valve closed
2/25/10	11:10:11 AM	Bypass valve closed
2/25/10	11:10:11 AM	Bubbler valve closed
2/25/10	11:10:11 AM	Helium MFC set to  0.000000
2/25/10	11:10:11 AM	H2 MFC set to  0.000000
2/25/10	11:10:11 AM	BCl3 MFC set to  0.000000
2/25/10	11:10:11 AM	SiCl4 MFC set to  0.000000
2/25/10	11:10:11 AM	Bypass solenoid MFC set to  760.000000
2/25/10	11:10:11 AM	Tube furnace set to 0
2/25/10	11:10:13 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:pumpdown.xml
2/25/10	11:10:15 AM	Recipe started at 11:10 AM
2/25/10	11:10:15 AM	Helium valve closed
2/25/10	11:10:15 AM	H2 valve closed
2/25/10	11:10:15 AM	BCl3 valve closed
2/25/10	11:10:15 AM	PH3 valve closed
2/25/10	11:10:15 AM	SiCl4 pre valve closed
2/25/10	11:10:15 AM	SiCl4 post valve closed
2/25/10	11:10:15 AM	Main Vac valve closed
2/25/10	11:10:15 AM	Bubbler valve closed
2/25/10	11:10:15 AM	Bypass valve opened
2/25/10	11:10:15 AM	Helium MFC set to  0.000000
2/25/10	11:10:15 AM	H2 MFC set to  0.000000
2/25/10	11:10:15 AM	BCl3 MFC set to  0.000000
2/25/10	11:10:15 AM	SiCl4 MFC set to  0.000000
2/25/10	11:10:15 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:10:15 AM	Tube furnace set to 0
2/25/10	11:10:25 AM	Helium valve closed
2/25/10	11:10:25 AM	H2 valve closed
2/25/10	11:10:25 AM	BCl3 valve closed
2/25/10	11:10:25 AM	PH3 valve closed
2/25/10	11:10:25 AM	SiCl4 pre valve closed
2/25/10	11:10:25 AM	SiCl4 post valve closed
2/25/10	11:10:25 AM	Bubbler valve closed
2/25/10	11:10:25 AM	Main Vac valve opened
2/25/10	11:10:25 AM	Bypass valve opened
2/25/10	11:10:25 AM	Helium MFC set to  0.000000
2/25/10	11:10:25 AM	H2 MFC set to  0.000000
2/25/10	11:10:25 AM	BCl3 MFC set to  0.000000
2/25/10	11:10:25 AM	SiCl4 MFC set to  0.000000
2/25/10	11:10:25 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:10:25 AM	Tube furnace set to 0
2/25/10	11:10:25 AM	Run finished at 11:10 AM
2/25/10	11:10:25 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:pumpdown.xml
2/25/10	11:11:37 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:11:40 AM	Recipe started at 11:11 AM
2/25/10	11:11:40 AM	H2 valve closed
2/25/10	11:11:40 AM	BCl3 valve closed
2/25/10	11:11:40 AM	PH3 valve closed
2/25/10	11:11:40 AM	SiCl4 pre valve closed
2/25/10	11:11:40 AM	SiCl4 post valve closed
2/25/10	11:11:40 AM	Main Vac valve closed
2/25/10	11:11:40 AM	Bypass valve closed
2/25/10	11:11:40 AM	Bubbler valve closed
2/25/10	11:11:40 AM	Helium valve opened
2/25/10	11:11:40 AM	Helium MFC set to  500.000000
2/25/10	11:11:40 AM	H2 MFC set to  0.000000
2/25/10	11:11:40 AM	BCl3 MFC set to  0.000000
2/25/10	11:11:40 AM	SiCl4 MFC set to  0.000000
2/25/10	11:11:40 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:11:40 AM	Tube furnace set to 0
2/25/10	11:11:43 AM	Helium valve closed
2/25/10	11:11:43 AM	H2 valve closed
2/25/10	11:11:43 AM	BCl3 valve closed
2/25/10	11:11:43 AM	PH3 valve closed
2/25/10	11:11:43 AM	SiCl4 pre valve closed
2/25/10	11:11:43 AM	SiCl4 post valve closed
2/25/10	11:11:43 AM	Main Vac valve closed
2/25/10	11:11:43 AM	Bypass valve closed
2/25/10	11:11:43 AM	Bubbler valve closed
2/25/10	11:11:43 AM	Helium MFC set to  0.000000
2/25/10	11:11:43 AM	H2 MFC set to  0.000000
2/25/10	11:11:43 AM	BCl3 MFC set to  0.000000
2/25/10	11:11:43 AM	SiCl4 MFC set to  0.000000
2/25/10	11:11:43 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:11:43 AM	Tube furnace set to 0
2/25/10	11:11:43 AM	Run finished at 11:11 AM
2/25/10	11:11:43 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:12:51 AM	Bypass valve opened
2/25/10	11:12:52 AM	Bypass valve closed
2/25/10	11:12:52 AM	Main Vac valve opened
2/25/10	11:12:53 AM	Main Vac valve closed
2/25/10	11:13:03 AM	Program exited cleanly
2/25/10	11:15:22 AM	Program started normally
2/25/10	11:15:22 AM	Helium valve closed
2/25/10	11:15:22 AM	H2 valve closed
2/25/10	11:15:22 AM	BCl3 valve closed
2/25/10	11:15:22 AM	PH3 valve closed
2/25/10	11:15:22 AM	SiCl4 pre valve closed
2/25/10	11:15:22 AM	SiCl4 post valve closed
2/25/10	11:15:22 AM	Main Vac valve closed
2/25/10	11:15:22 AM	Bypass valve closed
2/25/10	11:15:22 AM	Bubbler valve closed
2/25/10	11:15:22 AM	Helium MFC set to  0.000000
2/25/10	11:15:22 AM	H2 MFC set to  0.000000
2/25/10	11:15:22 AM	BCl3 MFC set to  0.000000
2/25/10	11:15:22 AM	SiCl4 MFC set to  0.000000
2/25/10	11:15:22 AM	Bypass solenoid MFC set to  760.000000
2/25/10	11:15:22 AM	Tube furnace set to 0
2/25/10	11:15:30 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:15:33 AM	Recipe started at 11:15 AM
2/25/10	11:15:33 AM	H2 valve closed
2/25/10	11:15:33 AM	BCl3 valve closed
2/25/10	11:15:33 AM	PH3 valve closed
2/25/10	11:15:33 AM	SiCl4 pre valve closed
2/25/10	11:15:33 AM	SiCl4 post valve closed
2/25/10	11:15:33 AM	Main Vac valve closed
2/25/10	11:15:33 AM	Bypass valve closed
2/25/10	11:15:33 AM	Bubbler valve closed
2/25/10	11:15:33 AM	Helium valve opened
2/25/10	11:15:33 AM	Helium MFC set to  500.000000
2/25/10	11:15:33 AM	H2 MFC set to  0.000000
2/25/10	11:15:33 AM	BCl3 MFC set to  0.000000
2/25/10	11:15:33 AM	SiCl4 MFC set to  0.000000
2/25/10	11:15:33 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:15:33 AM	Tube furnace set to 0
2/25/10	11:15:34 AM	Helium valve closed
2/25/10	11:15:34 AM	H2 valve closed
2/25/10	11:15:34 AM	BCl3 valve closed
2/25/10	11:15:34 AM	PH3 valve closed
2/25/10	11:15:34 AM	SiCl4 pre valve closed
2/25/10	11:15:34 AM	SiCl4 post valve closed
2/25/10	11:15:34 AM	Main Vac valve closed
2/25/10	11:15:34 AM	Bypass valve closed
2/25/10	11:15:34 AM	Bubbler valve closed
2/25/10	11:15:34 AM	Helium MFC set to  0.000000
2/25/10	11:15:34 AM	H2 MFC set to  0.000000
2/25/10	11:15:34 AM	BCl3 MFC set to  0.000000
2/25/10	11:15:34 AM	SiCl4 MFC set to  0.000000
2/25/10	11:15:34 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:15:34 AM	Tube furnace set to 0
2/25/10	11:15:34 AM	Run finished at 11:15 AM
2/25/10	11:15:34 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:15:38 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:15:41 AM	Recipe started at 11:15 AM
2/25/10	11:15:41 AM	H2 valve closed
2/25/10	11:15:41 AM	BCl3 valve closed
2/25/10	11:15:41 AM	PH3 valve closed
2/25/10	11:15:41 AM	SiCl4 pre valve closed
2/25/10	11:15:41 AM	SiCl4 post valve closed
2/25/10	11:15:41 AM	Main Vac valve closed
2/25/10	11:15:41 AM	Bypass valve closed
2/25/10	11:15:41 AM	Bubbler valve closed
2/25/10	11:15:41 AM	Helium valve opened
2/25/10	11:15:41 AM	Helium MFC set to  500.000000
2/25/10	11:15:41 AM	H2 MFC set to  0.000000
2/25/10	11:15:41 AM	BCl3 MFC set to  0.000000
2/25/10	11:15:41 AM	SiCl4 MFC set to  0.000000
2/25/10	11:15:41 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:15:41 AM	Tube furnace set to 0
2/25/10	11:15:46 AM	Helium valve closed
2/25/10	11:15:46 AM	H2 valve closed
2/25/10	11:15:46 AM	BCl3 valve closed
2/25/10	11:15:46 AM	PH3 valve closed
2/25/10	11:15:46 AM	SiCl4 pre valve closed
2/25/10	11:15:46 AM	SiCl4 post valve closed
2/25/10	11:15:46 AM	Main Vac valve closed
2/25/10	11:15:46 AM	Bypass valve closed
2/25/10	11:15:46 AM	Bubbler valve closed
2/25/10	11:15:46 AM	Helium MFC set to  0.000000
2/25/10	11:15:46 AM	H2 MFC set to  0.000000
2/25/10	11:15:46 AM	BCl3 MFC set to  0.000000
2/25/10	11:15:46 AM	SiCl4 MFC set to  0.000000
2/25/10	11:15:46 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:15:46 AM	Tube furnace set to 0
2/25/10	11:15:46 AM	Run finished at 11:15 AM
2/25/10	11:15:46 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:17:03 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:17:05 AM	Recipe started at 11:17 AM
2/25/10	11:17:05 AM	H2 valve closed
2/25/10	11:17:05 AM	BCl3 valve closed
2/25/10	11:17:05 AM	PH3 valve closed
2/25/10	11:17:05 AM	SiCl4 pre valve closed
2/25/10	11:17:05 AM	SiCl4 post valve closed
2/25/10	11:17:05 AM	Main Vac valve closed
2/25/10	11:17:05 AM	Bypass valve closed
2/25/10	11:17:05 AM	Bubbler valve closed
2/25/10	11:17:05 AM	Helium valve opened
2/25/10	11:17:05 AM	Helium MFC set to  500.000000
2/25/10	11:17:05 AM	H2 MFC set to  0.000000
2/25/10	11:17:05 AM	BCl3 MFC set to  0.000000
2/25/10	11:17:05 AM	SiCl4 MFC set to  0.000000
2/25/10	11:17:05 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:17:05 AM	Tube furnace set to 0
2/25/10	11:17:06 AM	Helium valve closed
2/25/10	11:17:06 AM	H2 valve closed
2/25/10	11:17:06 AM	BCl3 valve closed
2/25/10	11:17:06 AM	PH3 valve closed
2/25/10	11:17:06 AM	SiCl4 pre valve closed
2/25/10	11:17:06 AM	SiCl4 post valve closed
2/25/10	11:17:06 AM	Main Vac valve closed
2/25/10	11:17:06 AM	Bypass valve closed
2/25/10	11:17:06 AM	Bubbler valve closed
2/25/10	11:17:06 AM	Helium MFC set to  0.000000
2/25/10	11:17:06 AM	H2 MFC set to  0.000000
2/25/10	11:17:06 AM	BCl3 MFC set to  0.000000
2/25/10	11:17:06 AM	SiCl4 MFC set to  0.000000
2/25/10	11:17:06 AM	Bypass solenoid MFC set to  0.000000
2/25/10	11:17:06 AM	Tube furnace set to 0
2/25/10	11:17:06 AM	Run finished at 11:17 AM
2/25/10	11:17:06 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-23:tasks:vent.xml
2/25/10	11:17:38 AM	Program exited cleanly
